INFICON XTC/C Thin Film Deposition Controller - Manual (Page 113)

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XTC/C - XTC/2 Operating Manual
4.3 Alarms and Stops
There are a number of unusual instrument situations that may require operator
attention. These situations are detected and then treated as ALARMS or if very
serious, STOPS.
Both alarms and stops are indicated by a separate relay closure. An alarm
condition is not fatal, the instrument will continue the layer or process to normal
termination. A STOP is fatal, immediately halting the process. If desired, the
user may set the STOP ON ALARM configuration switch (see
section 2.6.2 on
page 2-19 ) to configure the instrument to treat an ALARM the same as STOP;
i.e., halting processing upon detection of the abnormal condition.
4.3.1 Alarms
The following conditions are considered ALARMS by the instrument and close
the ALARM RELAY.
Š Crucible hearth selection is not validated by the CRUCIBLE VALID input
within 30 seconds.
Š Rate control not established during the first 60 seconds of SHUTTER
DELAY (or 20X CTL TC if PID loop is used).
Š Rate has been out of control in DEPOSIT for 60 seconds (or 20X CTL TC if
PID loop is used).
Š The source power has constantly exceeded the MAX PWR parameter for 5
seconds. This is also indicated by the MAX POWER annunciator blinking.
4.3.2 Stops
The following actions or conditions produce a STOP state. This condition is
indicated by the STOP annunciator on the XTC/2 or the STOP LED on the
XTC/C and the closure of the STOP relay.
Š Pressing the front panel switch on the XTC/2.
Š Activating the STOP external input.
Š A CRYSTAL FAIL detected during any pre-deposit phase (when crystal
switching is not available).
Š A CRYSTAL FAIL detected during the DEPOSIT state if the TIME PWR
parameter is set to N (when crystal switching is not available).
Š Following the POST-DEPOSIT states of a layer that completed the
DEPOSIT state in TIME PWR.
Š Any of the ALARM conditions listed in Section 4.3.1 if the STOP ON
ALARM or STOP ON MAX PWR configuration switch is activated.