INFICON CrystalSix Sensor - Manual (Page 10)

1 - 2
IP
N 07
4-
15
5L
CrystalSix Operating Manual
1.1.1 Installation Requirements
1.1.1.1 Feedthrough
Š Qty (1) 2-3/4" ConFlat® with two coaxial feedthroughs, two pass water, one air
IPN 002-080, See
Figure 5-2 on page 5-2 or,
Š Qty (1) 1" bolt with one coaxial feedthrough, two pass water, one air IPN
750-030-G1, see
Figure 5-1 on page 5-1 .
1.1.1.2 Other
Š User to provide vacuum-tight braze joints or connectors for the water and air
tubes.
Š Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022" restrictor
orifice installed by the user. (Orifice included with CrystalSix accessory kit.) See
Table 1-3 on page 1-3 .
Š XIU or Oscillator designed to interface with the deposition controller.
Š Deposition controller must have been designed for this specific crystal sensor
(INFICON® XTC/2, XTC/C, IC/4, IC/4 PLUS, IC/5).
1.1.1.3 Utilities
Š Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to freeze).
Coolant should not contain chlorides as stress corrosion cracking may occur.
Š Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
Š 2 meter maximum length of 1/8" tubing between bellows assembly and the
control valve.
CAUTION
Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.
Water, air and coax length Standard 30" (76 cm)
Crystal exchange Front-loading, extraction tool required
(supplied with unit)
Mounting Six #4-40 tapped holes on the back of the
sensor body
Table 1-1 Sensor specification (continued)