Table 14: extended range pin-out, 0 _extended range – Brooks Instrument XacTorr CMX160 User Manual

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7.0 CMX MODELS WITH EXTENDED RANGE CAPABILITY

7.1 CMX WITH EXTENDED RANGE

The CMX can be configured with Extended Range (ER) Calibration. The ranges
that are currently supported for extended range calibration are 10T, 50T, and
500T. Legacy CMX devices are calibrated from 10% to 100% of full-scale
pressure (over one pressure decade). The Extended Range CMX is calibrated
from 1% to 100% of full-scale (over two pressure decades).

7.2 EXTENDED RANGE ACCURACY SPECIFICATION

The accuracy specification for Extended Range is shown in Table 13:

Dual-decade or extended range calibration enables the CMX to meet strict
accuracy specifications in the second pressure decade (1% to 10%) in addition
to the first decade (10% to 100%). Legacy gauges are only calibrated in the first
decade.

7.3 CMX EXTENDED RANGE CONNECTOR PIN-OUT

The pin-out for the extended Range CMX is shown in Table 14. Note that the
pin-out for the extended range device is very similar to the IN2 and IN3XP MFCs
with a DB9 connector. The wiring allows the user to use the CMX with the same
DB9 connector wiring that is used for IN2 and IN3XP MFCs.

CAUTION

!

!

The CMXER connector wiring is NOT the same as the legacy CMX DB9 wiring.

Table 13: CMX Extended Range Accuracy Specifications

Inlet Pressure

Accuracy Specification CMXER (digital

mode)

1% to 10%

0.15% + 0.006% FS

10% to 100%

0.15% + 0.006% FS

Table 14: Extended Range Pin-out

Pin

CMX Extended Range DB9

Connector Wiring

CMX Standard Connector

Wiring

IN2 and IN3XP Connector

Wiring (D/A)

1

Not Connected (N/A)

Pressure Output

Valve Voltage 0-5VDC

2

Pressure Output 0-10VDC

Not Used

Flow Output 0-5VDC

3

+15VDC

Temperature status (TTL)

+15VDC

4

Power Supply Common

+15VDC

Power Supply Common

5

-15VDC

-15VDC

-15VDC

6

Not Connected (N/A)

Case Ground

Setpoint 0-5VDC

7

Signal Common

Remote Zero

Signal Common

8

RS-485 Positive

Signal Ground

RS-485 Positive

9

RS-485 Negative

Power Supply Common

RS-485 Negative

7.0

_EXTENDED RANGE

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