INFICON Gemini ATM to Ultra-High Vacuum Gauge - Manual (Page 13)

tina83e1-a (2014-02) 13
Materials exposed to vacuum
Vacuum connection
Measuring chamber
stainless steel (1.4435)
stainless steel (1.4435)
Pirani filament ( MPG50x) W
Feedthrough, MAG/MPG500
Isolation
Ring
Anode, Pin
glass, ceramic (Al
2
O
3
)
stainless steel (1.4435)
Ni alloy
Feedthrough, MAG/MPG504 ceramic coated
Ionization chamber
3MAx-0xx-0x0x
stainless steel
(1.4301, 1.4016)
Ignition aid stainless steel (1.4310)
Internal volume
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 40 CF-R ≈ 19.9 cm 3
≈ 20.9 cm
3
≈ 25.2 cm
3
≈ 25.6 cm
3
Permissible pressure
(absolute) 10 bar, limited to inert gases
<55°C
Bursting pressure (absolute) >13 bar
Permissible temperatures
Operation
Pirani filament (MPG)
Bakeout
Storage +5 °C … +55 °C
120 °C
≤150 °C
3)
–40 °C … +70 °C
Relative humidity for 30 days a
year
1Ч10
-8
… 1Ч10
-2
mbar
1Ч10
-7
… 1Ч10
-2
mbar
≤70% (non-condensing)
≤95% (non-condensing)
Mounting orientation any
Use indoors only, altitude up to
6000 m NN
Degree of protection IP 40
3) Without electronics unit.