5 gas type dependence, 6 ignition delay – INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 33

Advertising
background image

tina83e1-a (2014-02)

33

The optimum measuring configuration for the particular pressure
range, in which measurement is performed, is used:

10

-3

mbar

10

-2

mbar

1000 mbar

1×10

-9

mbar

Cold cathode

Pirani


• The Pirani measuring circuit is always on
• The cold cathode measuring circuit is controlled by the Pirani

circuit and is activated only at pressures p < 1×10

-2

mbar

As long as the cold cathode measuring circuit has not ignited,
the measuring value of the Pirani is output as measuring signal.

4.5

Gas Type Dependence

The measurement value is gas dependent. The pressure reading
applies to dry air, O

2

, CO and N

2

. For other gases, it has to be

corrected:
• (MAG50x →  18)
• (MPG50x →  20).
If the gauge is operated with an INFICON controller, a calibration
factor for correction of the actual reading can be applied (→

of

the corresponding controller).

4.6 Ignition

Delay

An ignition delay occurs when cold cathode gauges are switched
on. The delay time increases at low pressures and is typically:

1Ч10

-5

… 1Ч10

-2

mbar < 1

second

1Ч10

-7

… 1Ч10

-5

mbar <20

seconds

5Ч10

-9

… 1Ч10

-7

mbar < 2

minutes

<5×10

-9

mbar <20

minutes


Advertising