Alicat MC Series Mass Flow Controller User Manual
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Technical Data for Alicat MC and MCR Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 3000 slpm Full Scale
Standard Operating Specifications (Contact Alicat for available options)
Performance
MC & MCR Mass Flow Controller
Accuracy at calibration
conditions after tare
± (0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration
conditions after tare
± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Repeatability
± 0.2% Full Scale
Zero Shift and Span Shift
0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown
Ratio
0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow
Rate
102.4% Full Scale
Typical Response Time
100 ms (Adjustable)
Warm-up Time
< 1 Second
Communications / Power
MC & MCR Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Input/Output Signal
1
Options
RS-232 Serial / RS-485 Serial / PROFIBUS
3
Analog Input/Output Signal
2
Options
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options
8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage
MC: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
MCR: 24 to 30 Vdc
Supply Current
MC: 0.250 Amp
MCR: 0.750 Amp
1. The
Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The
Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting
PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS
specifications for PROFIBUS supply voltages and currents. (
www.alicat.com/profibus)
Operating Conditions
MC & MCR Mass Flow Controller
Mass Reference Conditions (STP)
25ºC & 14.696 psia (standard — others available on request)
Operating Temperature
−10 to +50 ºCelsius
Humidity Range
(Non–Condensing)
0 to 100%
Maximum Pressure
145 psig
Mounting Attitude Sensitivity
MC: None
MCR: Mount with valve cylinder vertical & upright
Valve Type
Normally Closed
Ingress Protection
IP40
Wetted Materials
MC: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.
MCR: 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Alicat.
Range Specific Specifications
Full Scale Flow Mass
Controller
Pressure Drop
1
at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
2
MC 0.5 sccm to 50 sccm
1.0
3.9”H x 3.4”W x 1.1”D
M-5 (10-32) Female Thread
3
MC 100 sccm to 500 sccm
1.0
4.1”H x 3.6”W x 1.1”D
1/8” NPT Female
MC 1 slpm
1.5
MC 2 slpm
3.0
MC 5 slpm
2.0
MC 10 slpm
5.5
MC 20 slpm
20.0
MCR 50 slpm
2.0
5.5”H x 7.7”W x 2.3”D
1/4” NPT Female
MCR 100 slpm
3.2
MCR 250 slpm
2.4
5.5”H x 7.7”W x 2.3”D
1/2” NPT Female
MCR 500 slpm
6.5
5.5”H x 7.4”W x 2.3”D
3/4” NPT Female
(A 1-1/4” NPT Female process
connection is available for
2000 slpm controllers.)
MCR 1000 slpm
14.0
MCR 1500 slpm
17.0
MCR 2000 slpm
28.6
5.5”H x 8.1” W x 2.9” D
MCR 3000 slpm
16.8
5.5”H x 8.9” W x 2.9” D
1-1/4” NPT Female
1. Lower Pressure Drops Available, please see our
WHISPER-Series mass flow controllers at www.alicat.com/whisper.
2. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and
SAE connections upon request.
3. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.