Brooks Instrument 5850i - Manual (Page 49)

4-21
Brooks ® Model 5850i
Section 4 Maintenance Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
Materials: BMT = 316 Stainless Steel (ACLFE only)
BMA = Sintered 316 Stainless Steel (wire mesh only)
NOTE: For flow rates less than 8 sccm use the low flow plug,
P/N 618K019BMT in place of a restrictor assembly and install a low flow
filler ring P/N 724Z363BMT in the valve cavity after the orifice is installed.
Sensor conversion factor for the mixture is:
Air equivalent flow = 20/.903 = 22.15 slpm air.
In this example, a size 4 wire mesh assembly would be selected.